Average Co-Inventor Count = 5.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (1 from 10,295 patents)
1 patent:
1. 10002417 - Ready for rotation state detection device, method of detecting ready for rotation state and substrate processing apparatus