Yuji Sakai

Title: Innovations by Yuji Sakai

Introduction

Yuji Sakai is a notable inventor based in Koshi, Japan. He has made significant contributions to the field of substrate processing technology. With a total of three patents to his name, Sakai's work has advanced the efficiency and effectiveness of various industrial processes.

Latest Patents

One of Sakai's latest patents is a substrate processing apparatus. This apparatus includes a cover member that surrounds a substrate held by a rotary holder. It features a collecting member placed in an exhaust path formed between the cover member and the rotary holder. Additionally, a solvent supply is positioned above the collecting member, designed to supply a solvent to the collecting member. The solvent supply consists of an inner storage space surrounding the substrate, an outer storage space surrounding the inner storage space, and a partition wall that partitions the two spaces. Multiple communication holes penetrate the partition wall, allowing solvent to flow from the outer to the inner storage space. Furthermore, multiple dripping holes in the bottom wall of the inner storage space enable the solvent to drop toward the collecting member.

Another significant patent by Sakai is a solution treatment apparatus and cleaning method for such an apparatus. This invention includes a substrate holding unit that holds and rotates a substrate. A coating solution supply unit applies a coating solution to the substrate, while a cup unit surrounds the substrate holding unit. An exhaust path is provided between the substrate holding unit and the inner surface of the cup unit. Above this exhaust path, a coating solution collection unit is positioned, which includes an opening part for vertical communication. A solvent supply unit is responsible for supplying solvent for the coating solution to the collection unit, and a relay unit is located above the collection unit, projecting from the inner surface of the cup unit.

Career Highlights

Yuji Sakai is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at this company has allowed him to focus on innovative solutions in substrate processing.

Collaborations

Sakai has collaborated with notable coworkers such as Satoshi Shimmura and Kenta Shibasaki. Their combined expertise has contributed to the development of advanced technologies in their field.

Conclusion

Yuji Sakai's contributions to substrate processing technology through his patents and work at Tokyo Electron Limited highlight his role as an influential inventor. His innovations continue to impact the industry positively.