Company Filing History:
Years Active: 1996-2000
Title: Yuichiro Fujikawa: Innovator in Film Forming Technology
Introduction
Yuichiro Fujikawa is a notable inventor based in Yamanashi-ken, Japan. He has made significant contributions to the field of film forming technology, holding a total of 6 patents. His work primarily focuses on improving processes and apparatuses used in semiconductor manufacturing.
Latest Patents
Fujikawa's latest patents include a trap apparatus designed for gas exhaust systems used in film forming equipment. This innovative trap apparatus features a case with a gas supply port and a gas exhaust port, allowing for efficient gas flow management. It includes partition plates that create multiple rooms within the case, each equipped with a trap mechanism to capture reaction byproducts from the exhaust gas. Additionally, a temperature control mechanism is integrated to manage the temperatures in each room effectively.
Another significant patent is for a film forming apparatus that facilitates the creation of thin films on semiconductor wafers. This apparatus utilizes a vacuum system that includes a main vacuum line and both high-vacuum and coarse control vacuum pumps. The design allows for the cleaning of the chamber's interior with a cleaning gas while maintaining optimal conditions for film formation.
Career Highlights
Fujikawa has worked with prominent companies in the semiconductor industry, including Tokyo Electron Limited and Tokyo Electron Kabushiki Kaisha. His experience in these organizations has contributed to his expertise in developing advanced film forming technologies.
Collaborations
Fujikawa has collaborated with notable colleagues such as Kazuichi Hayashi and Tatsuo Hatano. Their combined efforts have furthered innovations in the field of semiconductor manufacturing.
Conclusion
Yuichiro Fujikawa's contributions to film forming technology and his innovative patents highlight his role as a key figure in the semiconductor industry. His work continues to influence advancements in manufacturing processes, showcasing the importance of innovation in technology.