This inventor holds 1 USPTO granted patent. Top assignee: Applied Materials, Inc.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Yuhyuk Cho and Process-Chamber Cleaning Innovation.
Introduction
Yuhyuk Cho is an inventor based in San Jose, California, whose patent work addresses cleaning operations in substrate-processing chambers. His disclosed invention connects cleaning parameters to deposition-thickness data and process-recipe conditions.
Latest Patents
Cho is associated with 1 patent: “Cleaning Operations Based on Deposition Thickness.” The method identifies deposition-thickness property data related to material deposited during one or more substrate-processing operations. It then uses that data and a variable clean-time relationship in the process recipe to determine cleaning parameters and initiate a cleaning operation in the processing chamber.
Career Highlights
Cho’s listed company is Applied Materials, Inc. His patent reflects work on adapting chamber-cleaning operations to deposition conditions, with the aim of determining cleaning parameters from process data.
Collaborations
Victor Zamarian is identified as Cho’s coworker. The available information does not specify whether Zamarian collaborated on the patent.
Conclusion
Yuhyuk Cho’s patent focuses on using deposition-thickness data and recipe-based cleaning relationships to guide cleaning operations in processing chambers.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile