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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12686918 B1

PDFFull Text
Date of Patent:
Jul. 21, 2026

Filed:

Jan. 05, 2023

Cleaning operations based on deposition thickness

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Victor Zamarian, Cupertino, CA (US);

Mitesh Harshad Sanghvi, Dublin, CA (US);

Venkatanarayana Shankaramurthy, San Jose, CA (US);

Yuhyuk Cho, San Jose, CA (US);

Deepesh Rai, Santa Clara, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:

Lowenstein Sandler LLP

Primary Examiner:

Kidest Worku

Int. Cl.
CPC ...
C23C 16/44 (2006.01); B08B 3/08 (2006.01); B08B 5/00 (2006.01); B08B 7/00 (2006.01); B08B 13/00 (2006.01); G05B 19/4155 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4405 (2013.01); B08B 3/08 (2013.01); B08B 5/00 (2013.01); B08B 7/0035 (2013.01); B08B 13/00 (2013.01); C23C 16/4407 (2013.01); G05B 19/4155 (2013.01); G05B 2219/35109 (2013.01); G05B 2219/45031 (2013.01);
Abstract

A method includes identifying deposition thickness property data associated with an amount of material deposited via one or more substrate processing operations of a process recipe performed in a processing chamber. The method further includes determining, based on the deposition thickness property data and a variable clean time relationship of the process recipe, cleaning operation parameters. The method further includes causing, based on the cleaning operation parameters, a cleaning operation in the processing chamber.

Find Patent Forward Citations

Zamarian, Victor. (2026). Cleaning operations based on deposition thickness (U.S. Patent No. 12686918). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12686918

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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