Company Filing History:
Years Active: 2019-2021
Title: **Innovative Contributions of Yu-Xiang Lin in the Field of Semiconductor Technology**
Introduction
Yu-Xiang Lin, based in Zhubei, Taiwan, is a notable inventor with a focus on innovations in semiconductor technology. With a total of six patents to his name, Lin has made significant strides in enhancing processes and tools used in semiconductor manufacturing, particularly within the realm of photoresist applications.
Latest Patents
Lin's recent inventions include a "Cup Wash Disk with Shims." This innovative device is designed for cleaning photoresist process tools. The cup wash disk features an upper plate positioned over a lower plate to form a cavity. This setup includes peripheral openings that allow fluid communication with the cavity, thereby facilitating an efficient cleaning process. Additionally, shims are integrated to create slits between the plates, improving the functionality of the cleaning device.
Another noteworthy patent is the "Edge-Exposure Tool with an Ultraviolet (UV) Light Emitting Diode (LED)." This edge-exposure tool features a process chamber, a workpiece table, a LED, and a controller. The tool is specially designed to expose only the edge portion of a photosensitive layer on a workpiece while protecting its center portion. By utilizing a LED to emit radiation, Lin's invention optimizes the edge exposure process, demonstrating his commitment to innovation in the field.
Career Highlights
Yu-Xiang Lin works at Taiwan Semiconductor Manufacturing Company Ltd., a leading player in the semiconductor industry. His contributions to the company and the field at large underline his expertise and innovative thinking. Lin's patents reflect a deep understanding of semiconductor processes and a drive to enhance existing technologies.
Collaborations
Throughout his career, Lin has collaborated with notable colleagues including Hua-Kuang Teng and Tien-Zeng Fang. These partnerships have potentially played a role in the development of his inventive concepts, contributing to the strength and relevance of his patents within the semiconductor field.
Conclusion
Yu-Xiang Lin stands out as an impactful inventor in semiconductor technology. With his recent patents focusing on cleaning tools and exposure techniques, he continues to push the boundaries of innovation. His work not only benefits his company but also the broader industry, demonstrating the vital role of inventors in advancing technology.