This inventor holds 1 USPTO granted patent and 4 published patent applications. Top assignee: Semes Co., Ltd.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Yu Ri Son: Inventor of Substrate-Treating Technology.
Introduction
Yu Ri Son is an inventor associated with Busan, South Korea, and Semes Co., Ltd. His patent work concerns equipment for treating substrates and monitoring particles in a load lock chamber.
Latest Patents
The provided information lists one patent for Yu Ri Son: “Substrate Treating Apparatus.” The invention describes a system with a load lock chamber whose interior pressure changes between a first pressure and a lower second pressure. An index chamber connects to the load lock chamber, while a measurement unit located outside the load lock chamber measures the particle level inside it.
Career Highlights
Son is associated with Semes Co., Ltd., a company involved in semiconductor manufacturing equipment. His listed invention addresses particle monitoring during substrate treatment, a process where controlling contamination can be important.
Collaborations
The available information identifies Semes Co., Ltd. as Son’s company affiliation. It does not specify additional collaborators or co-inventors for the listed patent.
Conclusion
Yu Ri Son’s listed patent reflects work on substrate-treatment equipment and particle-level measurement, with his record comprising 1 patent.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile