This inventor holds 4 USPTO granted patents and 2 published patent applications. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2021-2026.
Company Filing History:
Years Active: 2021-2026
Title: Innovations of Yu-Ping Tseng
Introduction
Yu-Ping Tseng is a notable inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 4 patents. His work focuses on enhancing the efficiency and effectiveness of semiconductor processing technologies.
Latest Patents
One of Yu-Ping Tseng's latest patents is a chemical mechanical polishing apparatus. This invention provides an apparatus and method for polishing a semiconductor substrate during semiconductor device manufacturing. The apparatus includes a carrier to hold the substrate, a polishing pad for polishing the substrate's surface, a chemical mechanical polishing (CMP) slurry delivery arm to dispense CMP slurry, and a pad conditioner to maintain the polishing pad's condition. The pad conditioner features a conditioning disk, a conditioning arm, magnetic screws for securing the disk, and blocking devices to prevent debris from entering screw holes.
Another significant patent is a method and apparatus for cleaning process monitoring. This system comprises a cleaning container with an inlet for cleaning solution and an outlet for waste solution. It includes a particle detector to measure particle parameters in the waste solution for real-time monitoring, a pump to draw the solution through the system, a controller to manage the cleaning process, and a host computer to provide control parameters.
Career Highlights
Yu-Ping Tseng is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has been instrumental in advancing technologies that improve semiconductor manufacturing processes.
Collaborations
Yu-Ping Tseng collaborates with talented individuals such as Charlie Wang and Y J Chen, who contribute to the innovative environment at their workplace.
Conclusion
Yu-Ping Tseng's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the industry. His inventions continue to influence the efficiency of semiconductor manufacturing processes.