Taipei, Taiwan

Yu-Ping Tseng


Average Co-Inventor Count = 4.0

ph-index = 1


Company Filing History:


Years Active: 2021-2024

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3 patents (USPTO):Explore Patents

Title: Innovations of Yu-Ping Tseng

Introduction

Yu-Ping Tseng is a notable inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 3 patents. His work focuses on enhancing the efficiency and effectiveness of semiconductor processing technologies.

Latest Patents

One of Yu-Ping Tseng's latest patents is a chemical mechanical polishing apparatus. This invention provides an apparatus and method for polishing a semiconductor substrate during semiconductor device manufacturing. The apparatus includes a carrier to hold the substrate, a polishing pad for polishing the substrate's surface, a chemical mechanical polishing (CMP) slurry delivery arm to dispense CMP slurry, and a pad conditioner to maintain the polishing pad's condition. The pad conditioner features a conditioning disk, a conditioning arm, magnetic screws for securing the disk, and blocking devices to prevent debris from entering screw holes.

Another significant patent is a method and apparatus for cleaning process monitoring. This system comprises a cleaning container with an inlet for cleaning solution and an outlet for waste solution. It includes a particle detector to measure particle parameters in the waste solution for real-time monitoring, a pump to draw the solution through the system, a controller to manage the cleaning process, and a host computer to provide control parameters.

Career Highlights

Yu-Ping Tseng is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has been instrumental in advancing technologies that improve semiconductor manufacturing processes.

Collaborations

Yu-Ping Tseng collaborates with talented individuals such as Charlie Wang and Y J Chen, who contribute to the innovative environment at their workplace.

Conclusion

Yu-Ping Tseng's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the industry. His inventions continue to influence the efficiency of semiconductor manufacturing processes.

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