Yu-Ming Tsui

Title: Innovations by Yu-Ming Tsui in Integrated Circuit Technology

Introduction

Yu-Ming Tsui is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of integrated circuits, particularly through his innovative patents. With a total of 2 patents, Tsui has demonstrated his expertise and commitment to advancing technology.

Latest Patents

One of Yu-Ming Tsui's latest patents is a method for making high-sheet-resistance polysilicon resistors for integrated circuits. This invention utilizes a two-layer polysilicon process to achieve a high-sheet-resistance polysilicon resistor. The process begins with the formation of FET gate electrodes and capacitor bottom electrodes from a polycide layer. Following this, a thin interpolysilicon oxide (IPO) layer is deposited to create the capacitor interelectrode dielectric. A doped polysilicon layer and an undoped polysilicon layer are then deposited and patterned to form the resistor. The doped polysilicon layer is in-situ doped to minimize the temperature and voltage coefficients of resistivity. The undoped polysilicon layer, which has a very high resistance, predominantly determines the resistance of the overall structure. The thickness of the doped polysilicon layer can be reduced to further increase the sheet resistance for mixed-mode circuits. Additionally, the undoped polysilicon layer allows for contact openings to be etched in an insulating layer over the resistor without damaging the underlying IPO layer.

Career Highlights

Yu-Ming Tsui is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he continues to innovate and contribute to the field of semiconductor technology. His work has been instrumental in enhancing the performance and reliability of integrated circuits.

Collaborations

Throughout his career, Tsui has collaborated with notable colleagues, including Wen-Cheng Chang and Shung-Jen Yu. These collaborations have further enriched his research and development efforts.

Conclusion

In summary, Yu-Ming Tsui is a distinguished inventor whose work in integrated circuit technology has led to significant advancements. His innovative patents and contributions to Taiwan Semiconductor Manufacturing Company Limited highlight his impact on the industry.