This inventor holds 2 USPTO granted patents and 1 published patent application. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2019-2024.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2019-2024
Title: Innovations by Yu-Lun Ke: Pioneering Semiconductor Processing Techniques
Introduction
Yu-Lun Ke, an accomplished inventor based in Hsinchu, Taiwan, has made significant contributions to the field of semiconductor manufacturing. With a total of two patents to his name, Yu-Lun focuses on refining plasma processing methods that enhance the efficiency and precision of semiconductor structures.
Latest Patents
Yu-Lun Ke's latest patents include a groundbreaking method titled "Plasma Processing Method for Manufacturing Semiconductor Structure." This innovative approach involves placing a wafer in a processing chamber surrounded by a focus ring, enabling the formation of plasma that processes the wafer effectively. The method also incorporates the detection of the focus ring's thickness and allows for the adjustment of plasma direction over the wafer's peripheral region accordingly.
Another noteworthy patent is for a "Focus Ring for Plasma Etcher." This method outlines how to mount a wafer on a chuck within an etching chamber, where the wafer is encircled by a focus ring. The invention describes adjusting the etch direction by modifying the vertical position of the focus ring relative to the wafer, thereby optimizing the etching process to achieve desired results.
Career Highlights
Yu-Lun Ke currently works at Taiwan Semiconductor Manufacturing Company Limited, a leading entity in the semiconductor industry. His expertise in plasma processing techniques positions him as a valuable asset within the company, contributing to innovations that push the boundaries of semiconductor technology.
Collaborations
In his professional journey, Yu-Lun collaborates closely with talented coworkers such as Yu-Chi Lin and Chin-Hsing Lin. Their teamwork fosters an environment of creativity and innovation, driving advancements in semiconductor processing methods and technologies.
Conclusion
With his inventive spirit and technical expertise, Yu-Lun Ke is shaping the future of semiconductor manufacturing. His patents not only reflect his dedication to innovation but also significantly contribute to the efficiency and capabilities of semiconductor technology. As the industry evolves, Yu-Lun's work at Taiwan Semiconductor Manufacturing Company Limited continues to pave the way for future advancements in the field.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile