This inventor holds 1 USPTO granted patent. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2008.
Company Filing History:
Years Active: 2008
Title: Innovations by Yu-Lin Du in Temperature Control Systems
Introduction
Yu-Lin Du is an accomplished inventor based in Chihshang Township, Taiwan. He has made significant contributions to the field of rapid thermal processing systems, particularly in the area of temperature control. His innovative approach has led to the development of a patented method that enhances the calibration and tuning of these systems.
Latest Patents
Yu-Lin Du holds a patent for a "Method for temperature control in a rapid thermal processing system." This method introduces a multi-zone interference correction processing technique for rapid thermal processing (RTP) systems. The innovation allows for improved calibration by accounting for zone coupling. The method involves establishing baseline characteristic data and zone characteristic data, which are then used to determine lamp-control parameters, such as temperature offset values, for temperature sensors within the RTP system. The baseline characteristic data provides insights into the heating uniformity of the RTP system, while the zone characteristic data is collected from various heating zones, each associated with a specific temperature probe.
Career Highlights
Yu-Lin Du is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading player in the semiconductor industry. His work focuses on enhancing the efficiency and accuracy of thermal processing systems, which are critical in semiconductor manufacturing. His innovative contributions have positioned him as a key figure in the field.
Collaborations
Yu-Lin Du has collaborated with notable colleagues, including Wei-Ming You and Shi-Ming Wang. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Yu-Lin Du's work in temperature control systems exemplifies the impact of innovative thinking in the semiconductor industry. His patented method not only improves the performance of rapid thermal processing systems but also showcases the importance of collaboration in driving technological advancements.