Yu-Li Hung

Title: Innovations by Yu-Li Hung in Semiconductor Manufacturing

Introduction

Yu-Li Hung is a notable inventor based in Tainan, Taiwan. She has made significant contributions to the field of semiconductor manufacturing, particularly through her innovative patent.

Latest Patents

Yu-Li Hung holds a patent for a "Dry etching gas and method of manufacturing semiconductor device." This patent outlines a method that includes providing a semiconductor substrate, forming a conductive region within the substrate, and creating a dielectric layer over it. The process involves dry etching the dielectric layer using a first etching gas to form a recessed feature, exposing the conductive region. A byproduct film is formed during this process, which is then chemically reacted with a second etching gas to build a sacrificial layer around the recessed feature.

Career Highlights

Yu-Li Hung is associated with Taiwan Semiconductor Manufacturing Company Limited, a leading entity in the semiconductor industry. Her work has been pivotal in advancing manufacturing techniques that enhance the efficiency and effectiveness of semiconductor devices.

Collaborations

Some of her notable coworkers include Te-Ming Kung and Chih-Hao Chen, who have collaborated with her on various projects within the semiconductor field.

Conclusion

Yu-Li Hung's contributions to semiconductor manufacturing through her innovative patent demonstrate her expertise and commitment to advancing technology in this critical industry. Her work continues to influence the development of efficient semiconductor devices.