Yu-Feng Han

Title: Innovations of Yu-Feng Han in Chemical-Mechanical Planarization

Introduction

Yu-Feng Han is a notable inventor based in Hsin-Chu, Taiwan. He has made significant contributions to the field of chemical-mechanical planarization (CMP) systems. With a total of 2 patents, his work focuses on enhancing the efficiency and functionality of CMP processes.

Latest Patents

One of Yu-Feng Han's latest patents is a removable tray assembly for CMP systems. This innovative tray assembly features a dual-structure design, comprising an upper tray and a lower tray. The lower tray can be easily disengaged from the upper tray using a dovetail joint, allowing for smooth sliding movement. Additionally, the assembly utilizes magnets to minimize the reliance on mechanical joints. This combination provides a quick and efficient method for sliding the lower tray in and out of the upper tray. The lower tray is designed with a collection region to gather any foreign materials generated during the CMP process. After cleaning, the lower tray can be reinserted into the upper tray for continued use.

Another significant patent by Han is the platen stopper. This stopper includes a head portion that is designed to be coupled to the upper platen of a CMP system. The stopper leg is configured to direct the flow of liquid slurry applied to the upper planar surface away from the lower surface of the upper platen. This design enhances the effectiveness of the CMP process by ensuring optimal slurry application.

Career Highlights

Yu-Feng Han is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he continues to innovate in the field of semiconductor manufacturing. His work has been instrumental in improving CMP technologies, which are critical for the production of advanced semiconductor devices.

Collaborations

Throughout his career, Han has collaborated with esteemed colleagues, including A S Chen and Cheng-Yi Huang. These collaborations have contributed to the advancement of CMP technologies and have fostered a productive research environment.

Conclusion

In summary, Yu-Feng Han is a prominent inventor whose contributions to chemical-mechanical planarization have significantly impacted the semiconductor industry. His innovative patents and ongoing work at Taiwan Semiconductor Manufacturing Company Limited highlight his dedication to advancing technology in this critical field.