This inventor holds 1 USPTO granted patent. Top assignee: Zhejiang Cheer Technology Co., Ltd.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Youyang Chi and Immersion Fluid Recovery Technology
Introduction
Youyang Chi is an inventor associated with Hangzhou, China, and Zhejiang Cheer Technology Co., Ltd. His patent work addresses the recovery of immersion fluid in systems used in semiconductor manufacturing.
Latest Patents
Chi is credited with 1 patent: “Immersion Fluid Recovery System and Immersion Fluid Recovery Method Using Said System.” The invention describes a system with a recovery cavity, a sealing extraction opening, a recovery flow path, a gas-liquid separator, and an orifice plate. Positioned above a substrate, the apparatus extracts immersion fluid from the gap between itself and the substrate, while also drawing gas from the fluid’s radial outer side. The recovery cavity communicates with both the extraction opening and the gas-liquid separator. Through-holes in the orifice plate are smaller than the recovery pipe, supporting the system’s fluid-recovery process.
Career Highlights
Chi’s listed patent reflects work on equipment for managing immersion fluid near a substrate. The design combines fluid extraction, gas-liquid separation, and a flow-path orifice plate in a single recovery system.
Collaborations
Chi is associated with Zhejiang Cheer Technology Co., Ltd. His listed coworkers include Wenyu Chen and Xin Fu.
Conclusion
Youyang Chi’s patent focuses on recovering immersion fluid and separating it from gas in semiconductor-processing equipment, highlighting his contribution to fluid-management technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile