The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2026
Filed:
Nov. 05, 2020
Zhejiang Cheer Technology Co., Ltd., Hangzhou, CN;
Xin Fu, Hangzhou, CN;
Youyang Chi, Hangzhou, CN;
Min Wu, Hangzhou, CN;
Yuan Li, Hangzhou, CN;
Jinjie Tong, Hangzhou, CN;
Liang Du, Hangzhou, CN;
Ning Xu, Hangzhou, CN;
Wenyu Chen, Hangzhou, CN;
ZHEJIANG CHEER TECHNOLOGY CO., LTD., Hangzhou, CN;
Abstract
An immersion fluid recovery system and method. The system includes a recovery cavity, a sealing extraction opening, a recovery flow path, a gas-liquid separator, and an orifice plate; the sealing extraction opening and recovery cavity are at a terminal objective lens and in an immersion fluid supply and recovery apparatus above a substrate; the sealing extraction opening is in the apparatus and oriented toward the substrate, the sealing extraction opening extracts immersion fluid from a gap between the apparatus and substrate, and extracts a gas at the radial outer side of the immersion fluid; the recovery cavity is inside the apparatus and communicates with the sealing extraction opening; the recovery cavity communicates with the gas-liquid separator; the orifice plate is in the recovery flow path and has through holes. The size of the through holes is less than that of a recovery pipe of the recovery flow path.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile