Jinjie Tong

Title: Jinjie Tong and Immersion Fluid Recovery Technology.

Introduction

Jinjie Tong is an inventor associated with Hangzhou, China, and Zhejiang Cheer Technology Co., Ltd. His work includes an invention for recovering immersion fluid in a system used around a substrate and terminal objective lens.

Latest Patents

The provided information lists one patent for Tong: “Immersion Fluid Recovery System and Immersion Fluid Recovery Method Using Said System.” The invention describes a recovery cavity connected to a sealing extraction opening and a gas-liquid separator. The opening extracts immersion fluid from the gap between the apparatus and substrate, while also extracting gas from the fluid’s radial outer side. An orifice plate in the recovery flow path contains through holes smaller than the recovery pipe, forming part of the system’s fluid-recovery arrangement. Tong is credited with 1 patent in the supplied data.

Career Highlights

Tong’s listed patent focuses on immersion-fluid recovery in an apparatus positioned above a substrate. Its components include the sealing extraction opening, recovery cavity, recovery flow path, gas-liquid separator, and orifice plate. The patent information connects his work with Zhejiang Cheer Technology Co., Ltd.

Collaborations

The supplied information names Liang Du and Youyang Chi as Tong’s coworkers. It does not specify their roles in the patent or describe particular collaborative contributions.

Conclusion

Jinjie Tong’s listed invention addresses the recovery of immersion fluid and gas in a substrate-processing system, with a design that combines extraction, separation, and controlled flow components.