Young-Su Sung

Title: Young-Su Sung: Innovator in Reflective Extreme Ultraviolet Mask Technology

Introduction

Young-Su Sung is a prominent inventor based in Chuncheon-si, South Korea. He has made significant contributions to the field of photomask technology, particularly in the development of reflective extreme ultraviolet (EUV) masks. With a total of 3 patents to his name, his work has been instrumental in advancing manufacturing processes in the semiconductor industry.

Latest Patents

One of Young-Su Sung's latest patents is titled "Reflective Extreme Ultraviolet Mask and Method of Manufacturing the Same." This innovative patent describes a reflective EUV mask that includes a mask substrate with an exposing region and a peripheral region. The mask substrate features a light scattering crystalline portion that effectively scatters light incident to the peripheral region, thereby decreasing reflectivity in that area. Additionally, the reflective layer on the upper surface of the mask substrate has a first opening that exposes the crystalline portion, while an absorbing layer pattern on the reflective layer includes a second opening in fluidic communication with the first opening.

Another notable patent is the "Method for Inspecting Critical Dimension Uniformity at High Speed Measurement." This method enhances the production yield by inspecting the uniformity of critical dimensions (CD) of a photomask pattern. It involves precisely measuring the photomask using an electron microscope and obtaining a measurement image with multiple patterns through high-speed photography using an optical microscope. The method calculates a gray level based on the CD by capturing just the pattern area in the measurement image, allowing for clearer confirmation of CD uniformity during high-speed measurements.

Career Highlights

Young-Su Sung is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate and contribute to the field of semiconductor manufacturing. His expertise in photomask technology has positioned him as a key player in the industry.

Collaborations

Throughout his career, Young-Su Sung has collaborated with notable colleagues, including Hoon Tae Kim and Young-Kuen Kim. These collaborations have further enriched his work and contributed to advancements in their shared field of expertise.

Conclusion

Young-Su Sung's contributions to the development of reflective extreme ultraviolet masks and inspection methods have significantly impacted the semiconductor industry. His innovative patents and ongoing work at Samsung Electronics Co., Ltd. highlight his role as a leading inventor in this critical field.