This inventor holds 1 USPTO granted patent. Top assignee: Samsung Electronics Co., Ltd.. Active years: 2013.
Company Filing History:
Years Active: 2013
Title: Young-Kuen Kim: Innovator in Reflective Extreme Ultraviolet Mask Technology
Introduction
Young-Kuen Kim is a prominent inventor based in Seoul, South Korea. He is known for his significant contributions to the field of semiconductor manufacturing, particularly in the development of reflective extreme ultraviolet (EUV) masks. His innovative work has implications for the advancement of photolithography techniques used in the production of integrated circuits.
Latest Patents
Young-Kuen Kim holds a patent for a reflective extreme ultraviolet mask and the method of manufacturing the same. This patent describes a reflective EUV mask that includes a mask substrate with an exposing region and a peripheral region. The mask substrate features a light scattering crystalline portion that scatters light incident to the peripheral region, thereby decreasing reflectivity in that area. Additionally, the reflective layer on the upper surface of the mask substrate has a first opening that exposes the crystalline portion, while an absorbing layer pattern on the reflective layer includes a second opening in fluidic communication with the first opening. This innovative design enhances the efficiency and effectiveness of EUV lithography.
Career Highlights
Young-Kuen Kim is currently employed at Samsung Electronics Co., Ltd., a leading global technology company. His work at Samsung has positioned him at the forefront of semiconductor innovation, contributing to the company's reputation for excellence in technology and manufacturing.
Collaborations
Throughout his career, Young-Kuen Kim has collaborated with notable colleagues, including Young-Su Sung and Dong-Seok Nam. These collaborations have fostered a dynamic environment for innovation and have led to advancements in the field of semiconductor technology.
Conclusion
Young-Kuen Kim's contributions to the development of reflective extreme ultraviolet masks represent a significant advancement in semiconductor manufacturing technology. His innovative patent and work at Samsung Electronics Co., Ltd. highlight his role as a key figure in the industry.