This inventor holds 1 USPTO granted patent. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2006.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2006
Title: Young-Cheng Chen and Semiconductor Process Control.
Introduction
Young-Cheng Chen is an inventor based in Jhubei, Taiwan. His patent work addresses process control in semiconductor manufacturing, with a focus on achieving precise critical dimensions in production.
Latest Patents
Chen is associated with 1 patent, titled “Process Controller for Semiconductor Manufacturing.” The patent describes a method for controlling a product’s critical dimensions during a semiconductor processing operation. It measures a previously formed dimension, calculates an energy value using the measured and desired dimensions, and determines the target energy by considering the energy used for a prior product. This approach is intended for production flows involving low-volume, high-precision semiconductor products.
Career Highlights
Chen’s disclosed invention concerns the relationship between process energy and dimensional accuracy. By using measurements from the product and information from an earlier production step, the method provides a way to adjust processing conditions toward a desired critical dimension.
Collaborations
Chen is associated with Taiwan Semiconductor Manufacturing Company, Ltd. His coworker, You-Wei Shen, is also identified in connection with the provided information.
Conclusion
Young-Cheng Chen’s patent highlights a process-control approach for improving dimensional precision in semiconductor manufacturing.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile