Location History:
- Tokyo, JP (1999 - 2005)
- Saitama, JP (2011 - 2015)
Company Filing History:
Years Active: 1999-2015
Title: The Innovative Contributions of Yosuke Shirata
Introduction: Yosuke Shirata is a prominent inventor based in Saitama, Japan, known for his significant contributions to the field of exposure apparatus technology. With a commendable portfolio of seven patents, Shirata has played a vital role in advancing methods and apparatuses that enhance the efficiency and precision of device fabrication processes.
Latest Patents: Among his recent innovations are two patents that focus on exposure apparatus adjustments and methods for device fabrication. The first patent introduces an adjusting method for an immersion exposure apparatus. This system utilizes two holders: a first holder that secures the substrate and a second holder that positions the substrate before exposure. Key to this method is the use of thermometers held by both holders to adjust their temperatures based on their respective detection results.
The second patent involves an innovative exposure apparatus that utilizes exposure light passing through an immersion liquid. This apparatus features an optical member with an emergent surface, a first supply port for the exposure liquid, and a liquid immersion member that facilitates the formation of an immersion space. Additionally, it incorporates a preventive apparatus that ensures the cleaning liquid does not come into contact with the optical member.
Career Highlights: Yosuke Shirata has demonstrated remarkable expertise during his tenure at Nikon Corporation, where he has been instrumental in developing state-of-the-art technologies for photolithography. His work directly impacts the production of semiconductor devices, making him an invaluable asset to his team and the company.
Collaborations: Throughout his career, Shirata has collaborated with talented coworkers such as Masahiko Okumura and Yoshiki Kida. These partnerships have fostered a creative and innovative environment that encourages the exchange of ideas and the development of groundbreaking technologies.
Conclusion: Yosuke Shirata's innovative spirit and dedication to his field have led to vital advancements in exposure apparatus technology. His patents not only reflect his ingenuity but also contribute to the broader landscape of device fabrication, paving the way for future innovations within the industry.