Yoshimasa Iiduka

Title: Innovations of Yoshimasa Iiduka

Introduction

Yoshimasa Iiduka is a notable inventor based in Kawasaki, Japan. He has made significant contributions to the field of optical proximity correction, with a focus on enhancing exposure methods and apparatuses. With a total of 4 patents to his name, Iiduka's work has had a substantial impact on the technology industry.

Latest Patents

Iiduka's latest patents include an exposure method utilizing optical proximity corrected exposure patterns and an apparatus for generating optical proximity corrected exposure data. In his exposure method, he carries out optical proximity correction processing for exposure data that contains multiple exposure patterns. The exposure patterns are converted into a minus objective pattern and a minus pattern, which is then deleted from the minus objective pattern to create corrected exposure data. This process allows for the formation of a bitmapped corrected exposure pattern, which is used to expose a sample accurately.

Another significant patent involves a method and device for detecting patterns, as well as checking and correcting patterns. This innovation focuses on selecting alignment patterns whose barycenter positions remain unchanged despite deformation caused by proximity effects during pattern formation. By setting these barycenter positions as alignment reference coordinates, rough alignment can be achieved, ensuring that the target pattern is detected accurately.

Career Highlights

Yoshimasa Iiduka is currently employed at Fujitsu Corporation, where he continues to develop innovative technologies. His work at Fujitsu has allowed him to collaborate with other talented professionals in the field, further enhancing his contributions to optical proximity correction.

Collaborations

Some of Iiduka's notable coworkers include Masahiko Minemura and Tomoyuki Okada. Their collaborative efforts have played a crucial role in advancing the research and development of optical proximity correction technologies.

Conclusion

Yoshimasa Iiduka's innovative work in optical proximity correction has led to significant advancements in exposure methods and apparatuses. His contributions continue to influence the technology industry, showcasing the importance of innovation in driving progress.