The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2003
Filed:
Jan. 19, 2001
Tomoyuki Okada, Kawasaki, JP;
Yoshimasa Iiduka, Kawasaki, JP;
Kazuhiko Takahashi, Kawasaki, JP;
Masahiko Minemura, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
Provided is a computer for producing corrected pattern data which includes corrected features each obtained by adding auxiliary features (serifs) to the right-angle corners of an original feature to compensate for the photo proximity effect. The computer performs the step of: (S ) inputting an original pattern data; (S ) adding triangle or rectangle serifs to right-angle corners of original features, each serif having a side which is an extension of a first side of a corresponding original feature and another side which is a portion of the side adjacent to the first side; (S ) performing a geometric OR operation on the original feature and the serifs to obtain a synthesized feature; and (S ) decomposing the synthesized feature into basic figures which can be processed in an electron beam exposure apparatus.