This inventor holds 2 USPTO granted patents. Top assignee: Fujitsu Corporation. Active years: 1995-1998.
Company Filing History:
Years Active: 1995-1998
Title: Innovations by Yoshiko Okui
Introduction
Yoshiko Okui is a prominent inventor based in Kawasaki, Japan. She has made significant contributions to the field of semiconductor technology. With a total of 2 patents, her work focuses on improving the efficiency and effectiveness of semiconductor device fabrication.
Latest Patents
Yoshiko Okui's latest patents include a semiconductor substrate cleaning method and an apparatus made of silica for semiconductor device fabrication. The semiconductor substrate cleaning method involves immersing semiconductor substrates in pure water with a lowered dissolved-oxygen concentration and heating it to a temperature above 60 degrees Celsius. This innovative approach effectively etches oxide films on the surfaces of the semiconductor substrates, allowing for the removal of contaminants and residual chemicals without the need for additional chemical treatments. The method enhances cleaning efficiency while improving throughput.
The second patent pertains to an apparatus made of silica, such as a heating furnace or wafer basket, used in semiconductor device fabrication. This apparatus features a first silica layer that contains a large amount of OH groups on the side facing the semiconductor wafer, while the opposed side has a second silica layer with a smaller amount of OH groups. This design minimizes the release of impurities from the first silica layer and reduces deformation of the apparatus, further enhancing the reliability of semiconductor manufacturing processes.
Career Highlights
Yoshiko Okui is currently employed at Fujitsu Corporation, where she continues to innovate in the semiconductor field. Her work has garnered attention for its practical applications and contributions to advancing technology.
Collaborations
Yoshiko has collaborated with notable colleagues, including Haruhisa Mori and Ken Yamazaki, to further enhance her research and development efforts.
Conclusion
Yoshiko Okui's contributions to semiconductor technology through her innovative patents demonstrate her commitment to advancing the field. Her work not only improves manufacturing processes but also sets a foundation for future innovations in semiconductor devices.