Location History:
- Itami, JP (1995 - 1996)
- Tokyo, JP (2000)
Company Filing History:
Years Active: 1995-2000
Title: Innovations of Yoshiki Kojima
Introduction
Yoshiki Kojima is a prominent inventor based in Itami, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on enhancing the efficiency and precision of semiconductor fabrication processes.
Latest Patents
Kojima's latest patents include an innovative alignment mark for electron beam lithography. This alignment mark is designed for fabricating semiconductor devices with a high density of circuit patterns and fine patterns. Notably, it prevents electrical charging during multiple scans by the electron beam. The design reverses the areas of the conductive layer and the exposed surface of the semiconductor substrate compared to conventional alignment marks. Additionally, he has developed a pattern transfer mask for optical exposure processes. This mask features a transparent substrate with a light shielding film that transfers desired patterns to a photoresist film. It also includes projections that reduce the intensity of light transmitted through the substrate.
Career Highlights
Kojima is currently employed at Mitsubishi Electric Corporation, where he continues to innovate in semiconductor technologies. His work has been instrumental in advancing the capabilities of electron beam lithography and optical exposure processes.
Collaborations
Throughout his career, Kojima has collaborated with notable colleagues, including Mitsunori Nakatani and Hiroyuki Minami. These collaborations have further enriched his contributions to the field.
Conclusion
Yoshiki Kojima's innovative patents and career at Mitsubishi Electric Corporation highlight his significant impact on semiconductor technology. His work continues to pave the way for advancements in the industry.