The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2000
Filed:
May. 29, 1998
Applicant:
Inventor:
Yoshiki Kojima, Tokyo, JP;
Assignee:
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N / ; G01J / ;
U.S. Cl.
CPC ...
2504911 ; 2504922 ;
Abstract
An alignment mark for fabricating a semiconductor device having a high density of circuit patterns and fine patterns using electron beam lithography techniques. No electrical charging of the alignment mark occurs during several scans by the electron beam. The area of a conductive layer and the area where the surface of a semiconductor substrate is exposed are reversed from those of the conventional alignment mark. The novel alignment mark includes a surface of the semiconductor substrate exposed through a conductive layer on the semiconductor substrate.