This inventor holds 2 USPTO granted patents and 1 published patent application and 2 EPO patents. Top assignee: Rorze Corporation. Active years: 2008-2023.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Hiroshima, JP (2008)
- Kasaoka, JP (2023)
Company Filing History:
Years Active: 2008-2023
Title: Innovations of Yoshiki Fukuzaki
Introduction
Yoshiki Fukuzaki is a notable inventor based in Hiroshima, Japan. He has made significant contributions to the field of electrostatic capacitance sensors and wafer positioning technologies. With a total of 2 patents, his work has advanced the precision and efficiency of various industrial processes.
Latest Patents
Fukuzaki's latest patents include an electrostatic capacitance sensor designed to eliminate noise interference from static eliminators or driving sources. This sensor allows for accurate measurements of electrostatic capacitance, even when using a thin-type detection unit that can be accessed by a wafer transfer robot's finger surface. The invention incorporates an AC supply source, a parasitic capacitance compensation circuit, operational amplifiers, differential amplifiers, phase detection means, and low pass filters to enhance measurement accuracy.
Another significant patent involves a wafer positioning method and device, which improves the speed and precision of wafer positioning operations. This system calculates the position of a wafer's notch part and its maximum or minimum eccentric radius based on the rotation angle of the wafer seat and detection results from a line sensor. The wafer seat drive means then adjusts the rotation axis position and angle to ensure optimal alignment.
Career Highlights
Yoshiki Fukuzaki is currently employed at Rorze Corporation, where he continues to innovate in the field of semiconductor manufacturing technologies. His work has been instrumental in enhancing the capabilities of wafer processing systems.
Collaborations
Fukuzaki collaborates with talented coworkers, including Tomoyuki Shitaku and Tomoyuki Shintaku, who contribute to the development of advanced technologies in their field.
Conclusion
Yoshiki Fukuzaki's contributions to the field of electrostatic capacitance sensors and wafer positioning technologies demonstrate his commitment to innovation and excellence. His patents reflect a deep understanding of the complexities involved in semiconductor manufacturing, paving the way for future advancements.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile