Yoshikazu Kobayashi

Title: **Yoshikazu Kobayashi: Innovator in Wafer Processing Technologies**

Introduction

Yoshikazu Kobayashi, an accomplished inventor based in Ota-ku, Japan, has made significant contributions to the field of semiconductor manufacturing. With a total of five patents to his name, he has developed innovative techniques that enhance wafer processing and device fabrication.

Latest Patents

Kobayashi's latest patents reflect his expertise in improving wafer processing methods. One notable patent is a wafer processing method that focuses on reducing the thickness of the wafer. In this method, the back side of a wafer, which houses multiple devices, is ground down to a predetermined thickness. Following the grinding step, the wafer's back side is polished to eliminate grinding strain. A silicon nitride film is then formed on the polished surface, ensuring a thickness of 6 to 100 nm. This meticulous process guarantees that each device on the wafer maintains sufficient die strength and gettering effect.

Another significant patent developed by Kobayashi is a device processing method that incorporates laser technology. In this method, a laser beam is applied to the wafer's back side along predetermined division lines. This creates division start points within the wafer, without reaching the final thickness of each device. A protective member is affixed to the front side of the wafer before or after these points are formed. By applying external force through the protective member, the wafer is divided along the lines, resulting in individual devices. The back side is then ground to remove any modified layers, followed by the application of a silicon nitride film on each device's side surface for improved performance.

Career Highlights

Kobayashi is currently associated with Disco Corporation, a leader in semiconductor manufacturing technology. His work focuses on creating efficient and effective methods for wafer processing, significantly contributing to the advancements in the semiconductor industry.

Collaborations

Throughout his career, Yoshikazu Kobayashi has collaborated with talented colleagues, including Seiji Harada and Keiichi Kajiyama. These collaborations have fostered an environment of innovation, enhancing the research and development efforts within Disco Corporation.

Conclusion

Yoshikazu Kobayashi's inventive spirit and dedication to advancing wafer processing technologies have played a pivotal role in the semiconductor industry. His patents not only showcase his innovative mindset but also provide substantial contributions to ensuring the efficiency and durability of semiconductor devices. As technology continues to evolve, Kobayashi remains a key figure in driving forward the innovations that shape the future of electronics.