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Yoshiharu Ota

USPTO Granted Patents = 5

Average Co-Inventor Count = 2.5

ph-index = 3

Forward Citations = 18(Granted Patents)

Location History:

Koshimachi, JP (1999)
Kumamoto-ken, JP (2000 - 2002)
Koshi, JP (2015)

Company Filing History:

5 out of 10,341

Tokyo Electron Limited

Years Active: 1999-2015

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5 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 9146481 - Local exposure apparatus, local exposure method and storage medium (2015-09-29),

2. 6336054 - Interlock apparatus for a transfer machine (2002-01-01),

3. 6183810 - Coating film forming method and coating apparatus (2001-02-06),

4. 6058544 - Scrubbing apparatus and scrubbing method (2000-05-09),

5. 5963449 - Interlock apparatus for a transfer machine (1999-10-05),

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