This inventor holds 1 USPTO granted patent and 3 published patent applications. Top assignee: Tokyo Ohka Kogyo Co., Ltd.. Active years: 2016.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2016
Title: Yoshiaki Masu: Innovator in Chamber Apparatus Technology
Introduction
Yoshiaki Masu is a notable inventor based in Kawasaki, Japan. He has made significant contributions to the field of chamber apparatus technology, particularly in the development of methods for heating substrates.
Latest Patents
Masu holds a patent for a "Chamber apparatus and heating method." This innovative apparatus includes a chamber designed to accommodate a substrate with a coating film. It features a first heating part located on one side of the substrate and a second heating part on the opposite side. Additionally, the apparatus includes a pressure control part that can pressurize and depressurize the chamber while in a heated state. This invention enhances the efficiency and effectiveness of substrate processing.
Career Highlights
Yoshiaki Masu has dedicated his career to advancing technology in the semiconductor and materials processing industries. His work at Tokyo Ohka Kogyo Co., Ltd. has positioned him as a key player in the development of innovative solutions for substrate treatment.
Collaborations
Masu has collaborated with esteemed colleagues such as Tsutomu Sahoda and Takashi Maruyama. Their combined expertise has contributed to the success of various projects and innovations within their field.
Conclusion
Yoshiaki Masu's contributions to chamber apparatus technology exemplify his commitment to innovation. His patent and collaborative efforts continue to influence advancements in substrate processing methods.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile