This inventor holds 2 USPTO granted patents and 1 published patent application. Top assignee: Shanghai Micro Electronics Equipment (Group) Co., Ltd.. Active years: 2020-2021.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2020-2021
Title: Yonghui Chen: Innovator in Semiconductor and Exposure Technologies
Introduction
Yonghui Chen is a prominent inventor based in Shanghai, China. He has made significant contributions to the fields of semiconductor devices and exposure systems. With a total of 2 patents, his work showcases innovative solutions that enhance processing efficiency and adaptability.
Latest Patents
Yonghui Chen's latest patents include an exposure system, exposure device, and exposure method. The exposure system comprises a laser unit, a light spot switching unit, and a lens unit. The laser unit is designed to produce a laser beam, while the light spot switching unit directs the laser beam along different optical paths based on the desired size of a light spot for a workpiece. This innovation allows for the formation of light spots sized in various ranges, catering to different workpieces with critical dimensions. As a result, it significantly improves processing adaptability and reduces costs.
Another notable patent is a rewiring method for semiconductor devices. This method calculates and corrects deviations of electrical connection terminals on a carrier by forming rewiring structures using mask-free photolithography. The combined use of mask-free and mask-based photolithography enhances efficiency and shortens the process cycle, making it a valuable advancement in semiconductor technology.
Career Highlights
Yonghui Chen is currently employed at Shanghai Micro Electronics Equipment (Group) Co., Ltd. His role in the company allows him to apply his innovative ideas and contribute to the development of cutting-edge technologies in the semiconductor and exposure sectors.
Collaborations
Yonghui has collaborated with notable coworkers, including Ke Lan and Yaping Ge. Their teamwork has fostered an environment of innovation and creativity, leading to the successful development of advanced technologies.
Conclusion
Yonghui Chen's contributions to the fields of semiconductor devices and exposure systems highlight his role as a leading inventor. His innovative patents demonstrate a commitment to enhancing efficiency and adaptability in technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile