Yonghang Fu

Title: **Innovator Yonghang Fu: Pioneering Defect Detection in Semiconductor Technology**

Introduction

Yonghang Fu, based in Plano, TX, is a prominent inventor known for his significant contributions to semiconductor technology. With three patents to his name, his innovative methods and systems have advanced the field of defect detection, enhancing the reliability and efficiency of semiconductor manufacturing processes.

Latest Patents

Yonghang Fu's latest patents showcase his expertise in optical inspection methods. One notable patent is a **Method and System for Defect Detection**, which involves a sophisticated approach to inspect semiconductor wafers. This method utilizes a staging platform and an optical platform to facilitate the scanning of the object's surface. The surface is illuminated with light of multiple wavelengths, enabling the collection of various images through time and frequency multiplexing. These images are stored in a database for subsequent analysis, wherein defect-detection algorithms are applied based on established protocols. This process effectively creates a defect mask for each pixel suspected of being defective, which is then compared to predetermined parameters to ascertain which suspected defects should be reported.

His second patent, the **System and Method for Performing Optical Inspection Utilizing Diffracted Light**, provides a detailed approach to inspecting structures on semiconductor wafers. In this system, a polychromatic light source illuminates the wafer's surface, while a multi-charge coupled device (CCD) camera captures the diffracted light. The captured light is then processed to create digitized images that reveal structural defects. By analyzing these diffractive images at various wavelengths, the system can effectively detect defects, enhancing the quality control process in semiconductor manufacturing.

Career Highlights

Throughout his career, Yonghang has made notable contributions while working for leading companies in the industry. He has held positions at **Rudolph Technologies, Inc.** and **Isoa, Inc.**, where he collaborated on groundbreaking projects related to semiconductor inspection technologies.

Collaborations

Yonghang Fu has worked alongside esteemed colleagues, including Yongqiang Liu and Youling Lin, fostering an environment of innovation and teamwork. Their collaborations have driven forward advancements in optical inspection and defect detection, reflecting the collective effort in the pursuit of technological excellence.

Conclusion

Yonghang Fu's inventive spirit and commitment to refining semiconductor inspection techniques have positioned him as a key figure in the field. His patents not only demonstrate technical prowess but also contribute significantly to the advancement of semiconductor manufacturing, setting a benchmark for future innovations.