Company Filing History:
Years Active: 2016-2024
Title: Inventor Yoji Sakata: Pioneering Innovations in Substrate Processing
Introduction
Yoji Sakata is a distinguished inventor based in Koshi, Japan, renowned for his contributions to substrate processing technologies. With a remarkable portfolio of five patents, his work has significantly influenced the semiconductor industry, primarily through advancements in substrate treatment methods and apparatus.
Latest Patents
Among his latest innovations are two notable patents that address critical aspects of substrate processing. The first patent describes a **substrate processing apparatus and substrate processing method**, which features a sophisticated arrangement of unit blocks designed to efficiently process substrates. This apparatus includes a first unit block with a substrate transfer region and processing modules, strategically positioned to facilitate superior substrate handling and processing.
The second patent involves a **substrate treatment system, substrate transfer method, and computer storage medium**. This system enhances the cleaning and inspection processes for wafers by integrating an interface station that ensures each wafer is properly cleaned and inspected before exposure. The intelligent control of wafer transfer mechanisms is particularly noteworthy, allowing for re-cleaning when necessary, thereby improving overall manufacturing output.
Career Highlights
Yoji Sakata is currently associated with Tokyo Electron Limited, a leading company in the semiconductor production equipment sector. His role at the company places him at the forefront of innovative research and development, helping to shape the future of substrate processing techniques.
Collaborations
Sakata's collaborative efforts with talented coworkers, including Masahiro Nakaharada and Akira Miyata, have fostered a dynamic environment for technological advancement. Their teamwork enhances creative solutions, enabling the delivery of cutting-edge technologies in the industry.
Conclusion
In conclusion, Yoji Sakata’s inventive spirit and commitment to excellence have positioned him as a notable figure in substrate processing innovation. Through his patents and collaborations, he continues to impact the semiconductor landscape, proving to be an invaluable asset to Tokyo Electron Limited and the industry at large.