Company Filing History:
Years Active: 2017-2023
Title: Yoichi Sera: Innovator in Reflective Mask Technology
Introduction
Yoichi Sera is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of reflective mask technology, holding a total of 7 patents. His work focuses on advancements that enhance the efficiency and effectiveness of reflective masks used in various applications.
Latest Patents
One of his latest patents is for a reflective mask blank that includes, on or above a substrate, a multilayer reflective film designed to reflect extreme ultraviolet (EUV) light. This innovative design also incorporates an absorber film that absorbs EUV light. The absorber film is made from a tantalum-based material, which provides a distinct peak in the X-ray diffraction pattern. This peak has a diffraction angle of 36.8 degrees or more and a full width at half maximum of 1.5 degrees or more. This technology is crucial for improving the performance of reflective masks in high-precision applications.
Career Highlights
Throughout his career, Yoichi Sera has worked with notable companies such as AGC Inc. and Asahi Glass Company, Limited. His experience in these organizations has allowed him to develop and refine his innovative ideas in the field of reflective mask technology.
Collaborations
Yoichi Sera has collaborated with talented individuals in his field, including Izuru Kashima and Yusuke Fujiwara. These partnerships have contributed to the advancement of his research and the successful development of his patents.
Conclusion
Yoichi Sera's contributions to reflective mask technology demonstrate his commitment to innovation and excellence. His patents and collaborations reflect a deep understanding of the complexities involved in this specialized field. His work continues to influence advancements in technology, making him a significant figure in the industry.