Agc Inc.

Asahi Glass Company, Limited

Yoichi Sera

Daisuke Kobayashi

Yuichi Suzuki

Yusuke Fujiwara

Izuru Kashima

Kiyoshi Tamai

Taku Yamada

Hiroshi Hanekawa

Sadatatsu Ikeda

Tsuyoshi Kakuta

Noriko Tanabe

A reflective mask blank includes, on/above a substrate in the following order from the substrate side a multilayer reflective film which reflects EUV light and an absorber film which absorbs EUV light. The absorber film is a tantalum-based material film containing a tantalum-based material. The absorber film provides a peak derived from the tantalum-based material in an X-ray diffraction pattern, the peak having a peak diffraction angle (2&#x3b8;) of 36.8 degrees or more and a full width at half maximum of 1.5 degrees or more.

Reflective mask blank and reflective mask

An object of the present invention is to provide a chemically strengthened glass that can effectively suppress strength of a glass from being deteriorated even though performing chemical strengthening and has high transmittance (that is, low reflectivity). The present invention relates to a chemically strengthened glass having a compressive stress layer formed on a surface layer thereof by an ion exchange method, in which the glass contains sodium and boron, and has a delta transmittance being +0.1% or more, and in which a straight line obtained by a linear approximation of a hydrogen concentration Y in a region of a depth X from an outermost surface of the glass satisfies a specific relational equation in X=0.1 to 0.4 (&#x3bc;m).

Chemically strengthened glass and production method for chemically strengthened glass

A chemically strengthened glass having a compressive stress layer formed in a surface layer thereof according to an ion exchange method, in which the glass has a surface roughness (Ra) of 0.20 nm or higher, a hydrogen concentration Y in a region to a depth X from an outermost surface of the glass satisfies the following relational equation (I) at X=from 0.1 to 0.4 (&#x3bc;m), a surface strength F (N) measured by a ball-on-ring test under the following conditions is (F&#x2265;1500&#xd7;t) relative to a sheet thickness t (mm) of the glass, and a surface of the glass has no polishing flaw:&#x2003;&#x2003;(I)in which meanings of respective symbols in the equation (I) are as follows: Y: hydrogen concentration (as HO, mol/L); X: depth from the outermost surface of the glass (&#x3bc;m); a: &#x2212;0.270 to &#x2212;0.005; and b: 0.020 to 0.220.

Chemically strengthened glass

A chemically strengthened glass having a compressive stress layer formed in a surface layer thereof according to an ion exchange method, in which a surface of the glass has polishing flaws, the glass has a texture direction index (Stdi) of 0.30 or more, a hydrogen concentration Y in a region to a depth X from an outermost surface of the glass satisfies the following relational equation (I) at X=from 0.1 to 0.4 (&#x3bc;m), and a surface strength F (N) measured by a ball-on-ring test is (F&#x2265;1400&#xd7;t) relative to a sheet thickness t (mm) of the glass:&#x2003;&#x2003;(I)in which meanings of respective symbols in the equation (I) are as follows: Y: hydrogen concentration (as HO, mol/L), X: depth from the outermost surface of the glass (&#x3bc;m), a: &#x2212;0.300 or more, and b: 0.220 or less.

Chemically strengthened glass and method for producing same

A chemically strengthened glass having a compressive stress layer formed in a surface layer thereof according to an ion exchange method, in which the glass has a surface roughness (Ra) of 0.20 nm or higher, a hydrogen concentration Y in a region to a depth X from an outermost surface of the glass satisfies the following relational equation (I) at X=from 0.1 to 0.4 (&#x3bc;m), a surface strength F (N) measured by a ball-on-ring test under the following conditions is (F&#x2267;1500&#xd7;t) relative to a sheet thickness t (mm) of the glass, and a surface of the glass has no polishing flaw:&#x2003;&#x2003;(I)in which meanings of respective symbols in the equation (I) are as follows: Y: hydrogen concentration (as HO, mol/L); X: depth from the outermost surface of the glass (&#x3bc;m); a: &#x2212;0.270 to &#x2212;0.005; and b: 0.020 to 0.220.

A method for producing a chemically strengthened glass, including a step of bringing a glass containing sodium into contact with an inorganic salt containing potassium nitrate, thereby performing ion exchange of a Na ion in the glass with a K ion in the inorganic salt, in which the inorganic salt contains at least one salt selected from the group consisting of KCO, NaCO, KHCO, NaHCO, KPO, NaPO, KSO, NaSO, KOH and NaOH, and the method includes: a step of washing the glass after the ion exchange; a step of subjecting the glass to an acid treatment after the washing; and a step of subjecting the glass to an alkali treatment after the acid treatment.

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Tokyo, Japan

Yoichi Sera