Yo-Yu Chang

Title: Innovations of Inventor Yo-Yu Chang in Semiconductor Processing

Introduction

Yo-Yu Chang is a prolific inventor based in New Taipei, Taiwan, known for his contributions to the field of semiconductor processing. With a total of two patents to his name, Chang has made significant advancements that enhance the efficiency and safety of electrostatic chucks used in plasma etching processes.

Latest Patents

Chang's latest inventions include the "Barrier Seal for Electrostatic Chuck" and the "Method of Installing Elastomer Ring in Semiconductor Processing Equipment." The barrier seal patent provides a multi-portioned design that prevents leaks from the electrostatic chuck during plasma etching, ensuring that even if one portion fails, the seal remains effective. This innovation not only improves product yield but also offers engineers a buffer period for repair before leaks occur, making the plasma processing safer and more reliable.

His second patent details an innovative method for installing an elastomer ring within semiconductor processing equipment. This method employs guiding sheets and jigs that enable the elastomer ring to be positioned smoothly and accurately in the groove. By dividing the ring into multiple arc portions and applying pressure in a specific sequence, the installation becomes more efficient, enhancing the fluid-blocking capabilities and the quality maintenance of the etching wafers during operation.

Career Highlights

Yo-Yu Chang is currently associated with MFC Sealing Technology Co., Ltd., where he has been instrumental in developing high-quality sealing solutions for semiconductor applications. His expertise has led to significant improvements in the performance of semiconductor processing equipment, reflecting his commitment to the field.

Collaborations

Throughout his career, Chang has collaborated with fellow inventor Chun-Yao Huang. Together, they have worked on advancing technologies that are vital to the semiconductor industry, fostering innovation and efficiency.

Conclusion

Yo-Yu Chang's contributions to semiconductor technology through his innovative patents exemplify the vital role inventors play in enhancing industry standards. His work not only improves operational efficiency but also ensures safety in semiconductor processing, marking him as a notable figure in the field of engineering and patent innovation.