Yiping Xu

USPTO Granted Patents = 5 (Patent Applications = 1)

EPO Patents = 1

Average Co-Inventor Count = 2.0

ph-index = 4

Forward Citations = 288(Granted Patents)

Company Filing History:

3 out of 1,787

Kla Tencor Corporation

patents

2 out of 641

Kla-tencor Technologies Corporation

patents

Years Active: 2002-2011

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5 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 7898661 - Spectroscopic scatterometer system (2011-03-01),

2. 7859659 - Spectroscopic scatterometer system (2010-12-28),

3. 7173699 - Spectroscopic scatterometer system (2007-02-06),

4. 6590656 - Spectroscopic scatterometer system (2003-07-08),

5. 6483580 - Spectroscopic scatterometer system (2002-11-19),

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1 patent pending:

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1 patent (EPO):

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