Yiping Song

Title: Yiping Song: Innovator in Electrostatic Clamping Technology

Introduction

Yiping Song is a notable inventor based in Yatton, GB. He has made significant contributions to the field of electrostatic clamping technology, particularly in the processing of dielectric wafers. His innovative approach has implications for various applications in the semiconductor industry.

Latest Patents

Yiping Song holds a patent for an "Electrostatic clamping method and apparatus." This invention describes a method of electrostatically clamping a dielectric wafer to a processing table during plasma processing. The table features interdigitated electrodes embedded within it. The method involves applying respective voltages of opposite first and second polarities to adjacent electrodes, inducing polarization charges in the wafer with opposite polarity to the underlying electrodes. This process effectively clamps the wafer to the table. After a predetermined time, the polarities of the voltages are reversed, allowing the electrostatic clamping to continue. The switching time between the first and second polarities is less than 2 seconds.

Career Highlights

Yiping Song is currently employed at Oxford Instruments Nanotechnology Tools Limited, where he continues to develop and refine his innovative technologies. His work has positioned him as a key player in the advancement of nanotechnology tools.

Collaborations

Yiping collaborates with esteemed colleagues such as Joao L G Ferreira and Michael Cooke, contributing to a dynamic and innovative work environment.

Conclusion

Yiping Song's contributions to electrostatic clamping technology highlight his role as an influential inventor in the semiconductor industry. His innovative methods and collaborative efforts continue to drive advancements in nanotechnology.