This inventor holds 2 USPTO granted patents. Top assignee: Chartered Semiconductor Manufacturing Ltd (Corporation). Active years: 2002-2003.
Company Filing History:
Years Active: 2002-2003
Title: Innovations by Inventor Ying Keung
Introduction
Ying Keung is a notable inventor based in Hong Kong, CN. He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his innovative approaches to transistor manufacturing.
Latest Patents
Ying Keung's latest patents include a method to form a vertical transistor by first forming a gate/spacer stack, followed by using selective epitaxy to create the source, drain, and channel. This method involves forming a doped region in a substrate and sequentially layering various dielectric and gate electrodes. A trench is created through these layers, and a gate dielectric layer is formed over the trench's sidewalls. The process continues with the formation of multiple doped and channel layers, culminating in a cap layer and contacts to the doped region and gate electrodes.
Another significant patent is a method to form a low parasitic capacitance pseudo-SOI CMOS device. This method describes the creation of elevated source/drain regions that can be utilized for local interconnects. The process includes shallow trench isolation regions within a semiconductor substrate, the fabrication of polysilicon gate electrodes, and the formation of dielectric spacers. The method emphasizes the careful deposition and etching of polysilicon layers to achieve the desired transistor characteristics.
Career Highlights
Ying Keung is currently employed at Chartered Semiconductor Manufacturing Ltd, where he applies his expertise in semiconductor technology. His work has contributed to advancements in the manufacturing processes of transistors, enhancing their performance and efficiency.
Collaborations
Ying Keung has collaborated with notable colleagues such as Elgin Kiok Quek and Ravi Sundaresan. Their combined efforts in the field of semiconductor technology have led to innovative solutions and improvements in manufacturing techniques.
Conclusion
Ying Keung's contributions to semiconductor technology through his patents and career at Chartered Semiconductor Manufacturing Ltd highlight his role as an influential inventor in the industry. His innovative methods for transistor manufacturing continue to impact the field positively.