Yin-feng Chan

Title: Yin-feng Chan’s Patents in Reticle Pod Inspection.

Introduction

Yin-feng Chan is an inventor based in New Taipei, Taiwan. Her patent work focuses on optical inspection technologies for reticle pods, which are used in semiconductor manufacturing. Chan is associated with Gudeng Equipment Co., Ltd. Her portfolio includes 2 patents.

Latest Patents

Chan’s latest patents describe complementary approaches to inspecting reticle pods and their components.

“Inspection Device for Sub-Element of Reticle Pod” presents a system with a carrier platform, coaxial light source, camera module, and control module. A height adjustment mechanism changes the distance between the light source and the platform, enabling optical inspection of a reticle pod sub-element.

“Optical Inspection Device for Surface of Reticle Pod and Optical Inspection Method for Surface of Reticle Pod” describes a carrier platform and two light sources that illuminate its surface from different directions. The control module switches between the sources, supporting efficient and precise inspection of a reticle pod’s surface.

Career Highlights

Chan’s disclosed inventions address optical inspection in semiconductor equipment. One patent focuses on adjusting the lighting geometry for inspecting a pod sub-element, while the other uses selectable illumination angles to examine a pod surface.

Collaborations

Chan is associated with Gudeng Equipment Co., Ltd. Her listed coworkers include Lin-hsin Tu and Ming-mo Lo.

Conclusion

Yin-feng Chan’s patent portfolio centers on optical inspection systems designed to support accurate examination of reticle pods and their components.