Yin-Cheng Ma

Title: Innovations by Yin-Cheng Ma in Semiconductor Technology

Introduction

Yin-Cheng Ma is a notable inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his innovative approach to improving semiconductor processing.

Latest Patents

One of his latest patents is for "Stationary and pivotable trays for semiconductor wafer transfer." This invention involves a first moving equipment that transports a container holding semiconductor wafers from a loading position to an immersion position. A stationary tray collects liquid dripping from the first moving equipment, while a pivotable tray is designed to collect liquid during the movement of the equipment. This innovative design enhances the efficiency of wafer transfer processes.

Another significant patent is the "Thermocoupled lift pin system for etching chamber." This system features multiple thermocoupled lift pins that can extend vertically from a heater block within a semiconductor etch chamber. The lift pins lower the semiconductor wafer onto the heater block before etching and lift it afterward. If the wafer's temperature exceeds a predetermined value, the lift pins release a cooling purge gas to prevent thermal stress during the transfer to a cooling chamber.

Career Highlights

Yin-Cheng Ma works at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work focuses on enhancing semiconductor processing techniques, which are crucial for the advancement of technology in various applications.

Collaborations

Yin-Cheng collaborates with talented individuals such as Yu-Chih Huang and Sawyer Ho, who contribute to the innovative environment at their workplace.

Conclusion

Yin-Cheng Ma's contributions to semiconductor technology through his patents reflect his commitment to innovation and excellence in the field. His work continues to influence the industry and pave the way for future advancements.