Company Filing History:
Years Active: 2006
Title: Yille A Saanila: Innovator in Integrated Circuit Technology
Introduction
Yille A Saanila is a notable inventor based in Helsinki, Finland. He has made significant contributions to the field of integrated circuits, particularly in the area of damascene metallization. His innovative work has led to the development of advanced methods and structures that enhance the performance of integrated circuits.
Latest Patents
Yille A Saanila holds 1 patent for his invention titled "Conformal lining layers for damascene metallization." This patent describes a method and structures for conformal lining of dual damascene structures in integrated circuits. The process involves forming trenches and contact vias in insulating layers, which are then exposed to alternating chemistries to create monolayers of a desired lining material. The exemplary process flows include alternately pulsed metal halide and ammonia gases injected into a constant carrier flow. This innovative approach allows for self-terminated metal layers to react with nitrogen, achieving near-perfect step coverage while minimizing the thickness required for a diffusion barrier function. Consequently, this maximizes the volume of subsequent filling metal for any given trench and via dimensions.
Career Highlights
Yille A Saanila is currently employed at ASM International N.V., a company renowned for its advancements in semiconductor manufacturing equipment. His work at ASM has positioned him as a key player in the development of cutting-edge technologies that drive the industry forward.
Collaborations
Yille collaborates with talented professionals in his field, including Ivo Johannes Raaijmakers and Suvi P. Haukka. Their combined expertise contributes to the innovative projects at ASM International N.V.
Conclusion
Yille A Saanila's contributions to integrated circuit technology through his patent on conformal lining layers exemplify the importance of innovation in the semiconductor industry. His work continues to influence advancements in the field, showcasing the potential for future developments.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.