Yia Chung Chang

Title: Yia Chung Chang: Innovator in Optical Scattering Analysis

Introduction

Yia Chung Chang is a notable inventor based in Champaign, IL (US). He has made significant contributions to the field of optical scattering analysis, holding a total of 2 patents. His work focuses on advanced methodologies that enhance the understanding and modeling of optical phenomena.

Latest Patents

One of Yia Chung Chang's latest patents is titled "CD Metrology Analysis Using Green's Function." This innovative method for modeling optical scattering begins with defining a zero-th order structure, which serves as an idealized representation of a subject that includes a perturbation domain and a background material. The process involves obtaining a Green's function and a zero-th order wave function for the zero-th order structure through rigorous coupled wave analysis (RCWA). Subsequently, a Lippmann-Schwinger equation is constructed, incorporating the Green's function, zero-th order wave function, and a perturbation function. The equation is evaluated over a selected set of mesh points within the perturbation domain, leading to the solution of linear equations that compute one or more reflection coefficients for the subject.

Career Highlights

Throughout his career, Yia Chung Chang has worked with prominent companies such as Therma-Wave, Inc. and Therm-Wave, Inc. His expertise in optical scattering has positioned him as a valuable asset in the field, contributing to advancements in metrology and analysis techniques.

Collaborations

Yia Chung Chang has collaborated with notable professionals in his field, including Hanyou Chu and Jon Opsal. These partnerships have further enriched his research and development efforts, leading to innovative solutions in optical analysis.

Conclusion

Yia Chung Chang's contributions to optical scattering analysis through his patents and collaborations highlight his role as an influential inventor. His work continues to impact the field, paving the way for future innovations in optical metrology.