This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Samsung Electronics Co., Ltd.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Yeongchan Cho and EUV Illumination System Innovation.
Introduction
Yeongchan Cho is an inventor based in Suwon, South Korea, whose patent work concerns extreme ultraviolet (EUV) lithography. His listed invention focuses on configuring an illumination system to improve EUV exposure.
Latest Patents
Cho is associated with 1 patent, titled “Method of Configuring Extreme Ultra-Violet (EUV) Illumination System, and EUV Exposure Method Using the EUV Illumination System.” The invention describes calculating aerial images through optical simulations of EUV point sources, combining those images according to EUV mapping, and evaluating source combinations with a fitness value. The system is configured using the combination that achieves the maximum fitness value. The method also describes using the resulting illumination system for EUV exposure.
Career Highlights
Cho’s listed patent is associated with Samsung Electronics Ltd. It addresses the optimization of EUV illumination, a technology used in semiconductor manufacturing.
Collaborations
The provided information names Minjae Kim and Sungmin Nam as Cho’s coworkers. Their specific roles in the patent or related work are not specified.
Conclusion
Yeongchan Cho’s recorded invention applies optical simulation and fitness-based selection to configure an EUV illumination system, connecting his patent work with semiconductor exposure technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile