This inventor holds 2 USPTO granted patents and 5 published patent applications. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2023-2024.
Company Filing History:
Years Active: 2023-2024
Title: Yen-Hui Li: Innovator in EUV Photolithography
Introduction
Yen-Hui Li is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of extreme ultraviolet (EUV) photolithography. With a total of 2 patents, his work focuses on enhancing the efficiency and effectiveness of EUV systems.
Latest Patents
Yen-Hui Li's latest patents include a system and method for cleaning an EUV mask. This innovative system is designed to clean debris from an EUV reticle. It features a cleaning electrode that is positioned adjacent to the EUV reticle. Additionally, the system incorporates a voltage source that draws debris toward the cleaning electrode by applying a voltage of alternating polarity.
Career Highlights
Yen-Hui Li is currently employed at Taiwan Semiconductor Manufacturing Company Limited. His work at this leading semiconductor manufacturer has allowed him to develop cutting-edge technologies in photolithography.
Collaborations
Some of his notable coworkers include Cheng-Han Yeh and Tzung-Chi Fu. Their collaboration has contributed to advancements in the field of semiconductor manufacturing.
Conclusion
Yen-Hui Li's contributions to EUV photolithography demonstrate his innovative spirit and commitment to advancing technology. His patents reflect a deep understanding of the challenges in the industry and offer practical solutions to enhance manufacturing processes.