Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Taiwan Semiconductor Manufacturing Comp. Ltd. (2 from 41,047 patents)
2 patents:
1. 12099310 - System and method for cleaning an EUV mask
2. 11681235 - System and method for cleaning an EUV mask