Yemin Tang

Title: Yemin Tang: Innovator in Capacitive-Based Transducers

Introduction

Yemin Tang is a prominent inventor based in Ann Arbor, MI (US). He has made significant contributions to the field of microstructures and accelerometers, holding two patents that showcase his innovative approach to technology.

Latest Patents

Yemin Tang's latest patents include a capacitive-based transducer with a high aspect ratio. This invention presents techniques for fabricating transducers and other types of microstructures that have high aspect ratios. The process involves etching wafers from both sides using deep reactive ion etching, resulting in a three-dimensional structure with a footprint of less than four hundred micrometers and a thickness ranging from 0.5 to 2 millimeters. This design offers advantages over conventional planar devices. Another notable patent is for high aspect-ratio low noise multi-axis accelerometers. This design utilizes CMOS-compatible fabrication technology to create a multi-axis capacitive accelerometer with sub-µg resolution. It features a large proof mass, high aspect ratio, and a significant sense electrode area within a smaller footprint compared to previous accelerometers. The innovative design allows for the placement of sense electrodes near the top or bottom of the transducer structure, enhancing sensitivity.

Career Highlights

Yemin Tang is affiliated with the University of Michigan, where he continues to advance research in his field. His work has garnered attention for its practical applications and innovative designs.

Collaborations

Yemin Tang collaborates with Khalil Najafi, contributing to the development of cutting-edge technologies in the realm of capacitive sensors and accelerometers.

Conclusion

Yemin Tang's contributions to the field of microstructures and accelerometers highlight his innovative spirit and dedication to advancing technology. His patents reflect a commitment to improving device performance and functionality.