The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2019
Filed:
Feb. 18, 2017
The Regents of the University of Michigan, Ann Arbor, MI (US);
Khalil Najafi, Ann Arbor, MI (US);
Yemin Tang, Ann Arbor, MI (US);
THE REGENTS OF THE UNIVERSITY OF MICHIGAN, Ann Arbor, MI (US);
Abstract
The design and fabrication of a multi-axis capacitive accelerometer is presented with sub-μg resolution based on CMOS-compatible fabrication technology that can provide large proof-mass, high-aspect ratio and a large sense electrode area within a smaller footprint that previous accelerometers. In some instances, the device footprint can be reduced by placing the sense electrodes near the top or bottom of the transducer structure such that motion of the transducer causes size of the sense gap to vary in a direction that is parallel with longitudinal axis of the support beam for the transducer structure. An extra mass can also be added to the top of the transducer structure to increase sensitivity.