Yasuyuki Yaginuma

Title: Yasuyuki Yaginuma: Pioneer in Synthetic Quartz Glass Innovations

Introduction

Yasuyuki Yaginuma is a notable inventor based in Koriyama, Japan, recognized for his contributions to the field of optical materials. With a total of three patents to his name, Yaginuma has made significant strides in developing advanced synthetic quartz glass optical materials, which are essential for high-precision applications in excimer laser technology.

Latest Patents

Yaginuma's most recent patents focus on synthetic quartz glass optical materials designed for excimer lasers. His first patent addresses a synthetic quartz glass optical material that exhibits high optical transmittance for radiation at 157 nm wavelength. This innovation demonstrates excellent resistance to F excimer laser irradiation while maintaining uniformity necessary for fine patterning. Key specifications include an OH group concentration of 0.5 ppm or lower and a controlled fluorine concentration between 0.1 to 2 mol %.

His second patent details a synthetic glass member suited for ArF excimer laser lithography. This invention is characterized by its superior homogeneity and transmittance with minimal internal strains, ensuring high performance in precise laser applications. Noteworthy features include a refractive index distribution and a minimum internal transmittance of about 99.8% at a wavelength of 193.4 nm, showcasing Yaginuma's expertise in creating advanced materials for cutting-edge technology.

Career Highlights

Yasuyuki Yaginuma’s career is marked by significant advancements in the optical materials sector. His innovative approaches in developing synthetic quartz glass have contributed to the evolution of excimer laser technology, impacting various applications in industries such as semiconductor manufacturing and photolithography. Yaginuma's dedication to research and development has positioned him as a leader in the field.

Collaborations

Throughout his career, Yaginuma has collaborated with esteemed colleagues, including Akira Fujinoki and Hiroyuki Nishimura. These partnerships exemplify the collaborative nature of innovation in the scientific community, emphasizing the importance of teamwork in achieving groundbreaking advancements in technology.

Conclusion

Yasuyuki Yaginuma is a distinguished inventor whose work in synthetic quartz glass optical materials is shaping the future of excimer laser applications. With his robust portfolio of patents and fruitful collaborations, Yaginuma continues to influence the landscape of optical technologies. His contributions are not only valuable to the present but also pave the way for future innovations in this critical field.