Other

Yasuyuki Yaginuma

Akira Fujinoki

Hiroyuki Nishimura

Takayuki Oshima

Akira Sato

Tetsuji Ueda

Toru Yokota

An object of the present invention is to provide a synthetic quartz glass optical material having a high optical transmittance for a radiation 157 nm in wavelength emitted from F excimer laser and a high resistance against irradiation of a F excimer laser radiation, yet having a uniformity suitable for such a fine patterning using a F excimer laser, and to provide an optical member using the same. The problems above are solved by a synthetic quartz glass optical material for F excimer lasers having an OH group concentration of 0.5 ppm or lower, a fluorine concentration of 0.1 to 2 mol %, a hydrogen molecule concentration of 5&times;10 molecules/cm or lower, a difference between the maximum and minimum fluorine concentrations within 20 mol ppm, and a difference between the maximum and minimum refraction indices of 2&times;10 or lower.

Synthetic quartz glass optical material and optical member

A synthetic glass member for use in excimer laser lithography, having superior homogeneity, high transmittance for ArF excimer laser beams and an excellent resistance against lasers is made from high purity synthetic quartz glass, and it is characterized in that layered structures, striae in three directions and internal strains are thermally and mechanically removed, the distribution of refractive index (&Dgr;n) in a plane orthogonal to the optical axis is up to about 1&times;10 , the distribution of refractive index (&Dgr;n) in a plane parallel to the optical axis is up to about 5&times;10 , the birefringence is up to about 2 nm/cm, the hydrogen molecule concentration is at least about 2&times;10 molecules/cm , and the internal transmittance is at least about 99.8% at a wavelength of 193.4 nm.

Synthetic quartz glass member for use in ArF excimer laser lithography

Method for producing synthetic quartz glass for use in ArF excimer laser lithography

Growing community of inventors

Koriyama, Japan

Yasuyuki Yaginuma