Company Filing History:
Years Active: 1997-2001
Title: Yasuyuki Tatara: Innovator in Semiconductor Technology
Introduction
Yasuyuki Tatara is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His work focuses on enhancing the reliability and efficiency of semiconductor devices.
Latest Patents
Tatara's latest patents include innovations in semiconductor devices featuring multi-layered metalization. One of his notable inventions is a semiconductor device that incorporates a metal layer between aluminum alloy and metal nitride layers. This design effectively prevents failures of interconnects caused by electromigration, which can lead to discontinuities in the aluminum alloy layer. In this invention, the metal used for both the metal layer and the nitride layer is often titanium. The manufacturing process involves forming an insulating layer on a semiconductor substrate, followed by the deposition of alloy, metal, and nitride layers in vacuum chambers. Techniques such as RF-bias sputtering or thermal evaporation deposition are utilized to apply these layers.
Another patent by Tatara also focuses on a semiconductor device with a multi-layered conductive structure. Similar to his previous work, this invention aims to prevent interconnect failures due to electromigration. The method of manufacturing mirrors that of his earlier patent, emphasizing the use of the same metal for both the metal layer and the nitride layer to streamline the deposition process.
Career Highlights
Throughout his career, Yasuyuki Tatara has worked with notable companies, including Oki Electric Industry Co., Ltd. and Electric Industry Co., Ltd. His experience in these organizations has contributed to his expertise in semiconductor technology and innovation.
Collaborations
Tatara has collaborated with several professionals in his field, including Makiko Nakamura and Yasuhiro Fukuda. These collaborations have likely enriched his work and led to further advancements in semiconductor technology.
Conclusion
Yasuyuki Tatara is a key figure in the semiconductor industry, with a focus on improving device reliability through innovative designs and manufacturing methods. His contributions continue to influence the field and pave the way for future advancements in technology.